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mobility-model-masetti

The Masetti bulk mobility model is used to simulate the doping dependent mobility in Si and takes into account the scattering of the carriers by charged impurity ions which leads to a degradation of the carrier mobility (ionized impurity scattering). This model is temperature independent and the parameters are given for 300 K. Thus it is only valid for 300 K.

G. Masetti, M. Severi and S. Solmi
Modeling of Carrier Mobility Against Carrier Concentration in Arsenic-, Phosphorus- and Boron-Doped Silicon
IEEE Trans. Electron Devices, Vol. ED-30 (7), 764 (1983)

    

The total concentration of ionized impurities is given by ND+NA.
Note: In nextnano³ we use the nominal dopant concentration as specified in the input file and not the ionized one.
The low-doping reference mobility µconstn,p is determined by the constant mobility-model (i.e. the values in the database under keyword $mobility-model-constant are the same as under this keyword). It is a model that combines lattice and impurity scattering.

Parameter in formula Description Input parameter
electrons holes   electrons holes
µmin1n µmin1p reference mobility parameter n-mu-min1 p-mu-min1
µmin2n µmin2p reference mobility parameter n-mu-min2 p-mu-min2
µ1n µm1p reference mobility parameter n-mu-1 p-mu-1
Pcn Pcp reference doping concentration parameter n-pc p-pc
Crn Crp reference doping concentration parameter n-cr p-cr
Csn Csp reference doping concentration parameter n-cs p-cs
an ap reference doping concentration parameter n-alpha p-alpha
bn bp reference doping concentration parameter n-beta p-beta
µconstn µconstp result of $mobility-model-constant
ND NA concentration of ionized donors/acceptors

 

!-------------------------------------------------------------!
$mobility-model-masetti                              optional !
                                                              !
 material-name                       character       required !
 number-of-parameters                integer         required !
                                                              !
!++++++++++++++++++++++++++++++++++++
! for binaries, e.g. GaAs
!++++++++++++++++++++++++++++++++++++
 n-mu-lattice-temp                   double          optional ! [cm2/Vs]  same as $mobility-model-constant
 n-gamma-lattice-temp                double          optional ! []        same as $mobility-model-constant
 n-mu-min1                           double          optional ! [cm2/Vs]
 n-mu-min2                           double          optional ! [cm2/Vs]
 n-mu-1                              double          optional ! [cm2/Vs]
 n-pc                                double          optional ! [cm-3]
 n-cr                                double          optional ! [cm-3]
 n-cs                                double          optional ! [cm-3]
 n-alpha                             double          optional ! []
 n-beta                              double          optional ! []
                                                              !
 p-mu-lattice-temp                   double          optional ! [cm2/Vs]  same as $mobility-model-constant
 p-gamma-lattice-temp                double          optional ! []        same as $mobility-model-constant
 p-mu-min1                           double          optional ! [cm2/Vs]
 p-mu-min2                           double          optional ! [cm2/Vs]
 p-mu-1                              double          optional ! [cm2/Vs]
 p-pc                                double          optional ! [cm-3]
 p-cr                                double          optional ! [cm-3]
 p-cs                                double          optional ! [cm-3]
 p-alpha                             double          optional ! []
 p-beta                              double          optional ! []
                                                              !
                                                              !
!++++++++++++++++++++++++++++++++++++
! for ternaries, e.g. Al(x)Ga(1-x)As
!++++++++++++++++++++++++++++++++++++
 n-bow-mu-lattice-temp               double          optional ! [cm2/Vs] for alloys
 n-bow-gamma-lattice-temp            double          optional ! []       for alloys
 n-bow-mu-min1                       double          optional ! [cm2/Vs] for alloys
 n-bow-mu-min2                       double          optional ! [cm2/Vs] for alloys
 n-bow-mu-1                          double          optional ! [cm2/Vs] for alloys
 n-bow-pc                            double          optional ! [cm-3]   for alloys
 n-bow-cr                            double          optional ! [cm-3]   for alloys
 n-bow-cs                            double          optional ! [cm-3]   for alloys
 n-bow-alpha                         double          optional ! []       for alloys
 n-bow-beta                          double          optional ! []       for alloys
                                                              !
 p-bow-mu-lattice-temp               double          optional ! [cm2/Vs] for alloys
 p-bow-gamma-lattice-temp            double          optional ! []       for alloys
 p-bow-mu-min1                       double          optional ! [cm2/Vs] for alloys
 p-bow-mu-min2                       double          optional ! [cm2/Vs] for alloys
 p-bow-mu-1                          double          optional ! [cm2/Vs] for alloys
 p-bow-pc                            double          optional ! [cm-3]   for alloys
 p-bow-cr                            double          optional ! [cm-3]   for alloys
 p-bow-cs                            double          optional ! [cm-3]   for alloys
 p-bow-alpha                         double          optional ! []       for alloys
 p-bow-beta                          double          optional ! []       for alloys
                                                              !
$end_mobility-model-masetti                          optional !
!-------------------------------------------------------------!

 

 

Syntax

material-name = Si
Name of material to which this set of parameters applies. Name has to be listed in $default-materials.

number-of-parameters = 20
Control parameter if the number of parameters provided is the same as demanded.

The parameters are specified as shown in the tables above. There are two sets, one for electrons (n-) and one for holes (p-).

!++++++++++++++++++++++++++++++++++++
! for ternaries, e.g. Al(x)Ga(1-x)As
!++++++++++++++++++++++++++++++++++++
 The specifiers containing "*-bow-*" are for alloys, i.e. ternaries.
By default, linear interpolation is used if the bowing parameter is zero.

material-name         = Al(x)Ga(1-x)As
number-of-parameters  = 4
n-bow-mu-lattice-temp = 0d0  ! [cm2/Vs]   Bowing parameters are zero if linear interpolation is used.
...